Invention Grant
- Patent Title: Extreme ultraviolet source with magnetic cusp plasma control
- Patent Title (中): 极紫外光源具有磁尖尖等离子体控制
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Application No.: US14317280Application Date: 2014-06-27
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Publication No.: US09155178B1Publication Date: 2015-10-06
- Inventor: Malcolm W. McGeoch
- Applicant: PLEX LLC
- Applicant Address: US MA Fall River
- Assignee: PLEX LLC
- Current Assignee: PLEX LLC
- Current Assignee Address: US MA Fall River
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic field barrier to radial motion. Plasma overflows in a full range of radial directions and is conducted by radial field lines to a large area annular array of beam dumps.
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