Invention Grant
US09155178B1 Extreme ultraviolet source with magnetic cusp plasma control 有权
极紫外光源具有磁尖尖等离子体控制

  • Patent Title: Extreme ultraviolet source with magnetic cusp plasma control
  • Patent Title (中): 极紫外光源具有磁尖尖等离子体控制
  • Application No.: US14317280
    Application Date: 2014-06-27
  • Publication No.: US09155178B1
    Publication Date: 2015-10-06
  • Inventor: Malcolm W. McGeoch
  • Applicant: PLEX LLC
  • Applicant Address: US MA Fall River
  • Assignee: PLEX LLC
  • Current Assignee: PLEX LLC
  • Current Assignee Address: US MA Fall River
  • Agency: Wolf, Greenfield & Sacks, P.C.
  • Main IPC: H05G2/00
  • IPC: H05G2/00
Extreme ultraviolet source with magnetic cusp plasma control
Abstract:
A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic field barrier to radial motion. Plasma overflows in a full range of radial directions and is conducted by radial field lines to a large area annular array of beam dumps.
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