Invention Grant
US09156258B2 Liquid ejecting head, liquid ejecting apparatus, piezoelectric element and sensor 有权
液体喷射头,液体喷射装置,压电元件和传感器

Liquid ejecting head, liquid ejecting apparatus, piezoelectric element and sensor
Abstract:
A liquid ejecting head including a piezoelectric element, the piezoelectric element includes: a first electrode; an orientation control layer provided on the first electrode, the orientation control layer having a perovskite structure including Bi in an A site and Fe and Ti in a B site, and the orientation control layer being self-oriented in a (100) plane; a piezoelectric body layer provided on the orientation control layer and made of a piezoelectric material of the perovskite structure preferentially oriented in the (100) plane; and a second electrode provided on the piezoelectric body layer.
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