Invention Grant
US09164231B2 Ultra-compact photodetector on an optical waveguide 有权
在光波导上的超小型光电探测器

Ultra-compact photodetector on an optical waveguide
Abstract:
An integrated circuit is described. This integrated circuit includes an optical waveguide defined in a semiconductor layer, and an optical detector disposed on top of the optical waveguide. Moreover, the optical waveguide has an end with a reflecting facet. For example, the reflective facet may be defined using an anisotropic etch of the semiconductor layer. This reflecting facet reflects light propagating in a plane of the optical waveguide out of the plane into the optical detector, thereby providing a photodetector with high optical responsivity, including an extremely low dark current (and, thus, high photosensitivity) and an extremely small capacitance (and, thus, high electrical bandwidth).
Public/Granted literature
Information query
Patent Agency Ranking
0/0