Invention Grant
- Patent Title: Ultra-compact photodetector on an optical waveguide
- Patent Title (中): 在光波导上的超小型光电探测器
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Application No.: US13205484Application Date: 2011-08-08
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Publication No.: US09164231B2Publication Date: 2015-10-20
- Inventor: Ivan Shubin , John E. Cunningham
- Applicant: Ivan Shubin , John E. Cunningham
- Applicant Address: US CA Redwood Shores
- Assignee: ORACLE INTERNATIONAL CORPORATION
- Current Assignee: ORACLE INTERNATIONAL CORPORATION
- Current Assignee Address: US CA Redwood Shores
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Agent Steven E. Stupp
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/42 ; G02B6/122

Abstract:
An integrated circuit is described. This integrated circuit includes an optical waveguide defined in a semiconductor layer, and an optical detector disposed on top of the optical waveguide. Moreover, the optical waveguide has an end with a reflecting facet. For example, the reflective facet may be defined using an anisotropic etch of the semiconductor layer. This reflecting facet reflects light propagating in a plane of the optical waveguide out of the plane into the optical detector, thereby providing a photodetector with high optical responsivity, including an extremely low dark current (and, thus, high photosensitivity) and an extremely small capacitance (and, thus, high electrical bandwidth).
Public/Granted literature
- US20130039614A1 ULTRA-COMPACT PHOTODETECTOR ON AN OPTICAL WAVEGUIDE Public/Granted day:2013-02-14
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