Invention Grant
- Patent Title: Wafer processing sheet
- Patent Title (中): 晶圆加工板
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Application No.: US13326103Application Date: 2011-12-14
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Publication No.: US09165815B2Publication Date: 2015-10-20
- Inventor: Se Ra Kim , Hyo Sook Joo , Suk Ky Chang , Jung Sup Shim
- Applicant: Se Ra Kim , Hyo Sook Joo , Suk Ky Chang , Jung Sup Shim
- Applicant Address: KR Seoul
- Assignee: LG CHEM, LTD.
- Current Assignee: LG CHEM, LTD.
- Current Assignee Address: KR Seoul
- Agency: Dentons US LLP
- Priority: KR10-2009-0052948 20090615
- Main IPC: H01L21/762
- IPC: H01L21/762 ; B32B27/40 ; H01L21/683

Abstract:
Provided is a sheet for processing a wafer. The sheet can exhibit excellent heat resistance and dimensional stability, prevent breakage of a wafer in response to residual stress due to excellent stress relaxation properties, inhibit damage to or dispersion of the wafer due to application of a non-uniform pressure, and also exhibit excellent cuttability. The sheet can effectively prevent a blocking phenomenon from occurring during wafer processing. For these reasons, the sheet can be useful for processing a wafer in various wafer preparation processes such as dicing, back-grinding and picking-up.
Public/Granted literature
- US20120202337A1 WAFER PROCESSING SHEET Public/Granted day:2012-08-09
Information query
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