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US09165969B2 Apparatus having thinner interconnect line for photodetector array and thicker interconnect line for periphery region 有权
具有较薄的用于光电检测器阵列的互连线和用于周边区域的较厚互连线的装置

Apparatus having thinner interconnect line for photodetector array and thicker interconnect line for periphery region
Abstract:
An apparatus of one aspect includes a photodetector array, and a peripheral region at a periphery of the photodetector array. A thinner interconnect line corresponding to the photodetector array is disposed within one or more insulating layers. A thicker interconnect line corresponding to the peripheral region is disposed within the one or more insulating layers. Other apparatus, methods, and systems are also disclosed.
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