Invention Grant
US09166022B2 Fin-like field effect transistor (FinFET) device and method of manufacturing same
有权
鳍状场效应晶体管(FinFET)器件及其制造方法
- Patent Title: Fin-like field effect transistor (FinFET) device and method of manufacturing same
- Patent Title (中): 鳍状场效应晶体管(FinFET)器件及其制造方法
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Application No.: US12917902Application Date: 2010-11-02
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Publication No.: US09166022B2Publication Date: 2015-10-20
- Inventor: Jeff J. Xu , Chih-Hao Chang
- Applicant: Jeff J. Xu , Chih-Hao Chang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/78

Abstract:
A FinFET device and method for fabricating a FinFET device is disclosed. An exemplary method includes providing a semiconductor substrate; forming a first fin structure and a second fin structure over the semiconductor substrate; forming a gate structure over a portion of the first and second fin structures, such that the gate structure traverses the first and second fin structures; epitaxially growing a first semiconductor material on exposed portions of the first and second fin structures, such that the exposed portions of the first and second fin structures are merged together; and epitaxially growing a second semiconductor material over the first semiconductor material.
Public/Granted literature
- US20120104472A1 FIN-LIKE FIELD EFFECT TRANSISTOR (FINFET) DEVICE AND METHOD OF MANUFACTURING SAME Public/Granted day:2012-05-03
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