Invention Grant
US09167680B2 Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method
有权
等离子体处理装置,等离子体发生装置,天线结构和等离子体产生方法
- Patent Title: Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method
- Patent Title (中): 等离子体处理装置,等离子体发生装置,天线结构和等离子体产生方法
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Application No.: US14011860Application Date: 2013-08-28
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Publication No.: US09167680B2Publication Date: 2015-10-20
- Inventor: Yohei Yamazawa , Takafumi Kimura , Chishio Koshimizu
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2012-191788 20120831
- Main IPC: H01Q1/26
- IPC: H01Q1/26 ; H01J7/24 ; H05H1/46 ; H01J37/32

Abstract:
A plasma processing apparatus includes: a mounting table, disposed in a processing chamber, configured to mount thereon the substrate; an inductively coupled antenna disposed outside the processing chamber to be opposite to the mounting table, the inductively coupled antenna being connected to a high frequency power supply; and a window member forming a wall of the processing chamber which faces the inductively coupled antenna. The window member includes a plurality of conductive windows made of a conductive material, and dielectric portions disposed between the conductive windows. The inductively coupled antenna is extended in a predetermined direction on the window member and electrically connected to one of the conductive windows, and electrical connection by conductors is sequentially performed from the one of the conductive windows to the other conductive windows in the same direction as an extension direction of the inductively coupled antenna.
Public/Granted literature
- US20140062296A1 PLASMA PROCESSING APPARATUS, PLASMA GENERATING APPARATUS, ANTENNA STRUCTURE AND PLASMA GENERATING METHOD Public/Granted day:2014-03-06
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