Invention Grant
- Patent Title: Calculating method of structural data of diffractive optical element, program, and manufacturing method
- Patent Title (中): 衍射光学元件的结构数据的计算方法,程序和制造方法
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Application No.: US13787971Application Date: 2013-03-07
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Publication No.: US09171107B2Publication Date: 2015-10-27
- Inventor: Kosuke Asano
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-052360 20120308
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F17/14 ; G03F7/20

Abstract:
A calculating method for calculating structural data of a two-level diffractive optical element configured to form a set of light intensity distributions point-symmetrical with respect to an axis on an image plane utilizing an iterative Fourier transform algorithm executed by a computer includes calculating a light intensity distribution and a phase distribution of a plane of the two-level diffractive optical element which has a Fourier transform relationship with the image plane by performing an inverse Fourier transform for a light intensity that is made by removing one of the set of light intensity distributions from the set of light intensity distributions, and calculating structural data of the diffractive optical element based upon the light intensity distribution and the phase distribution which have been calculated.
Public/Granted literature
- US20130238296A1 CALCULATING METHOD OF STRUCTURAL DATA OF DIFFRACTIVE OPTICAL ELEMENT, PROGRAM, AND MANUFACTURING METHOD Public/Granted day:2013-09-12
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