Invention Grant
- Patent Title: Parasitic extraction in an integrated circuit with multi-patterning requirements
- Patent Title (中): 具有多图案化要求的集成电路中的寄生提取
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Application No.: US14139023Application Date: 2013-12-23
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Publication No.: US09171124B2Publication Date: 2015-10-27
- Inventor: Nathan Buck , Brian Dreibelbis , John P. Dubuque , Eric A. Foreman , Peter A. Habitz , David J. Hathaway , Jeffrey G. Hemmett , Natesan Venkateswaran , Chandramouli Visweswariah , Vladimir Zolotov
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Hopewell Junction
- Assignee: GLOBALFOUNDRIES U.S. 2 LLC
- Current Assignee: GLOBALFOUNDRIES U.S. 2 LLC
- Current Assignee Address: US NY Hopewell Junction
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent David Cain
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Systems and methods are provided for extracting parasitics in a design of an integrated circuit with multi-patterning requirements. The method includes determining resistance solutions and capacitance solutions. The method further includes performing parasitic extraction of the resistance solutions and the capacitance solutions to generate mean values for the resistance solutions and the capacitance solutions. The method further includes capturing a multi-patterning source of variation for each of the resistance solutions and the capacitance solutions during the parasitic extraction. The method further includes determining a sensitivity for each captured source of variation to a respective vector of parameters. The method further includes determining statistical parasitics by multiplying each of the resistance solutions and the capacitance solutions by the determined sensitivity for each respective captured source of variation. The method further includes generating as output the statistical parasitics in at least one of a vector form and a collapsed reduced vector form.
Public/Granted literature
- US20140173543A1 PARASITIC EXTRACTION IN AN INTEGRATED CIRCUIT WITH MULTI-PATTERNING REQUIREMENTS Public/Granted day:2014-06-19
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