Invention Grant
US09171781B2 Semiconductor devices and methods of fabricating the same 有权
半导体器件及其制造方法

Semiconductor devices and methods of fabricating the same
Abstract:
Semiconductor devices, and methods of fabricating the same, include first conductive lines on a substrate, and a first molding layer covering the first conductive lines. The first conductive lines have air gaps between adjacent first conductive lines. Sidewalls of the first conductive lines and a bottom surface of the first molding layer collectively define a first gap region of each of the air gaps. The sidewalls of the first conductive lines and a top surface of the first molding layer collectively define a second air gap region of each of the air gaps.
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