Invention Grant
- Patent Title: Semiconductor devices and methods of fabricating the same
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US14134043Application Date: 2013-12-19
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Publication No.: US09171781B2Publication Date: 2015-10-27
- Inventor: Jang-Hee Lee , Jongmin Baek , Kyu-Hee Han , Gilheyun Choi , Jongwon Hong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2013-0015297 20130213
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/764 ; H01L23/482 ; H01L23/522 ; H01L21/768 ; H01L23/28

Abstract:
Semiconductor devices, and methods of fabricating the same, include first conductive lines on a substrate, and a first molding layer covering the first conductive lines. The first conductive lines have air gaps between adjacent first conductive lines. Sidewalls of the first conductive lines and a bottom surface of the first molding layer collectively define a first gap region of each of the air gaps. The sidewalls of the first conductive lines and a top surface of the first molding layer collectively define a second air gap region of each of the air gaps.
Public/Granted literature
- US20140225251A1 SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2014-08-14
Information query
IPC分类: