Invention Grant
- Patent Title: Ferroelectric capacitor
- Patent Title (中): 铁电电容器
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Application No.: US14300461Application Date: 2014-06-10
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Publication No.: US09171850B2Publication Date: 2015-10-27
- Inventor: Yoshikazu Fujimori , Hiroaki Ito , Tomohiro Date
- Applicant: Rohm Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Rohm Co., Ltd.
- Current Assignee: Rohm Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Fish & Richardson P.C.
- Priority: JP2011-128605 20110608
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L49/02

Abstract:
A ferroelectric capacitor includes a ferroelectric film, a lower electrode in contact with one surface of the ferroelectric film, and an upper electrode in contact with the other surface of the ferroelectric film. At least one of the upper electrode and the lower electrode has a stacked electrode structure in which one or more oxide conductive layers and one or more metal layers are stacked alternately, and the stacked electrode structure includes at least one of two or more oxide conductive layers and two or more metal layers.
Public/Granted literature
- US20140284766A1 FERROELECTRIC CAPACITOR Public/Granted day:2014-09-25
Information query
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