Invention Grant
US09171877B2 Semiconductor imaging device having ligth transmission layers formed relative to a guard ring structure in a predetermined manner 有权
具有相对于保护环结构以预定方式形成的透光层的半导体成像装置

Semiconductor imaging device having ligth transmission layers formed relative to a guard ring structure in a predetermined manner
Abstract:
A solid-state imaging device includes: a photodiode formed to be segmented with respect to each pixel in a pixel area in which plural pixels are integrated on a light receiving surface of a semiconductor substrate; an insulator film formed on the semiconductor substrate to cover the photodiode; a recessed part formed with respect to each of the pixels in the insulator film in an upper part of the photodiode; a first light transmission layer of a siloxane resin formed to fill the recessed part and configure an optical waveguide in the pixel area; a second light transmission layer formed to configure an on-chip lens with respect to each of the pixels in the pixel area; and a guard ring formed to surround an outer circumference of the pixel area to partition an inner area containing the pixel area and an outer dicing area.
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