Invention Grant
- Patent Title: Systems and methods for a three-layer chip-scale MEMS device
- Patent Title (中): 用于三层芯片级MEMS器件的系统和方法
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Application No.: US13296642Application Date: 2011-11-15
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Publication No.: US09171964B2Publication Date: 2015-10-27
- Inventor: Robert D. Horning , Ryan Supino
- Applicant: Robert D. Horning , Ryan Supino
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B7/00

Abstract:
Systems and methods for a micro-electromechanical system (MEMS) device are provided. In one embodiment, a system comprises a first outer layer and a first device layer comprising a first set of MEMS devices, wherein the first device layer is bonded to the first outer layer. The system also comprises a second outer layer and a second device layer comprising a second set of MEMS devices, wherein the second device layer is bonded to the second outer layer. Further, the system comprises a central layer having a first side and a second side opposite that of the first side, wherein the first side is bonded to the first device layer and the second side is bonded to the second device layer.
Public/Granted literature
- US20120126349A1 SYSTEMS AND METHODS FOR A THREE-LAYER CHIP-SCALE MEMS DEVICE Public/Granted day:2012-05-24
Information query
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