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US09171964B2 Systems and methods for a three-layer chip-scale MEMS device 有权
用于三层芯片级MEMS器件的系统和方法

Systems and methods for a three-layer chip-scale MEMS device
Abstract:
Systems and methods for a micro-electromechanical system (MEMS) device are provided. In one embodiment, a system comprises a first outer layer and a first device layer comprising a first set of MEMS devices, wherein the first device layer is bonded to the first outer layer. The system also comprises a second outer layer and a second device layer comprising a second set of MEMS devices, wherein the second device layer is bonded to the second outer layer. Further, the system comprises a central layer having a first side and a second side opposite that of the first side, wherein the first side is bonded to the first device layer and the second side is bonded to the second device layer.
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