Invention Grant
- Patent Title: Method for producing photoelectric converter and phtotelectric converter
- Patent Title (中): 光电转换器和电介质转换器的制造方法
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Application No.: US14375537Application Date: 2013-01-30
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Publication No.: US09171972B2Publication Date: 2015-10-27
- Inventor: Shiro Miyazaki , Tomofumi Honjo , Koji Niwa , Hironori Kii , Shigeo Aono , Yosuke Nishioka
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio, Cory, Hargreaves & Savitch, LLP
- Priority: JP2012-017018 20120130; JP2012-145039 20120628
- International Application: PCT/JP2013/052098 WO 20130130
- International Announcement: WO2013/115275 WO 20130808
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L31/0216 ; H01L31/0224 ; H01L31/18

Abstract:
The method for producing a photoelectric converter of the present invention comprises a preparation step for preparing a substrate (2) formed from silicon; a first film-formation step for the formation of a first protective film (3) by deposition of aluminum oxide on a top surface (2B) of the substrate (2) using the atom deposition method or chemical vapor deposition method in an atmosphere containing hydrogen; and a second film-formation step for forming a second protective film (4) by deposition of aluminum oxide on the first protective film (3) using sputtering after the first film-formation step. Moreover, the photoelectric converter of the present invention comprises a substrate formed from silicon; a first protective film formed from aluminum oxide; and a second protective film formed from aluminum oxide, wherein the concentration of hydrogen contained in the first protective film is higher than the concentration of hydrogen contained in the second protective film.
Public/Granted literature
- US20150001657A1 METHOD FOR PRODUCING PHOTOELECTRIC CONVERTER AND PHOTOELECTRIC CONVERTER Public/Granted day:2015-01-01
Information query
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