A continuous or semi-continuous process for producing a high purity germane includes (a) preparing a reaction mixture containing hydrogen and crude germane and (b) separating the hydrogen from the crude germane by a pressure swing adsorption process. The pressure swing adsorption process results in a hydrogen-rich product stream and a germane-rich product stream. The method further includes (c) purifying the germane-rich product stream by continuous distillation thereof to remove impurities therefrom and to produce a high purity germane containing less than 0.1 volume percent of impurities.