Invention Grant
- Patent Title: Processing tubular surfaces using double glow discharge
- Patent Title (中): 使用双辉光放电加工管状表面
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Application No.: US12169837Application Date: 2008-07-09
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Publication No.: US09175381B2Publication Date: 2015-11-03
- Inventor: Ronghua Wei
- Applicant: Ronghua Wei
- Applicant Address: US TX San Antonio
- Assignee: SOUTHWEST RESEARCH INSTITUTE
- Current Assignee: SOUTHWEST RESEARCH INSTITUTE
- Current Assignee Address: US TX San Antonio
- Agency: Grossman, Tucker et al
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/16 ; C23C14/54 ; C23C14/48 ; C23C14/04

Abstract:
A method of sputtering a component includes positioning a conductive substrate into a vacuum chamber, wherein the conductive substrate is tubular and has a surface. A source electrode including a source material may be inserted into the conductive substrate. A first bias voltage ΔVac1 may be applied between the conductive substrate and the vacuum chamber and a second bias voltage ΔVas1 may be applied between the source electrode and the vacuum chamber, sputtering the source material onto the conductive substrate.
Public/Granted literature
- US20100006421A1 Processing Tubular Surfaces Using Double Glow Discharge Public/Granted day:2010-01-14
Information query
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