Invention Grant
- Patent Title: Vacuum pumping system having an ejector and check valve
- Patent Title (中): 真空泵系统具有喷射器和止回阀
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Application No.: US13505337Application Date: 2010-10-27
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Publication No.: US09175688B2Publication Date: 2015-11-03
- Inventor: Thierry Neel
- Applicant: Thierry Neel
- Applicant Address: FR Annecy
- Assignee: ADIXEN VACUUM PRODUCTS
- Current Assignee: ADIXEN VACUUM PRODUCTS
- Current Assignee Address: FR Annecy
- Agency: Daly, Crowley, Mofford & Durkee, LLP
- Priority: FR0958138 20091118
- International Application: PCT/FR2010/052305 WO 20101027
- International Announcement: WO2011/061429 WO 20110526
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D19/02 ; F04D15/02 ; F04D25/16 ; F04D27/00 ; F04F5/20 ; F04F5/52 ; F04C23/00 ; F04C25/02 ; F04F5/54
Abstract:
A pumping device and method are described. The pumping device comprises a dry rough vacuum pump equipped with a gas inlet connected to a vacuum chamber, a gas outlet leading to a conduit and an ejector. The pumping method comprises pumping gases contained in the vacuum chamber using the dry rough vacuum pump through the gas inlet, measuring electric power consumed by the dry rough vacuum pump and the pressure of the gases in the conduit, starting the ejector, when the pressure of the gases at the outlet and the electrical power consumed cross respective set point values as they rise and stopping the ejector when the electric power consumed and the pressure of the gases in the conduit at the outlet cross respective set point values as they fall.
Public/Granted literature
- US20120219443A1 Method And Device For Pumping With Reduced Power Use Public/Granted day:2012-08-30
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