Invention Grant
US09175808B2 System and method for decreasing scrubber exhaust from gas delivery panels
有权
从气体输送板减少洗涤器排气的系统和方法
- Patent Title: System and method for decreasing scrubber exhaust from gas delivery panels
- Patent Title (中): 从气体输送板减少洗涤器排气的系统和方法
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Application No.: US13220890Application Date: 2011-08-30
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Publication No.: US09175808B2Publication Date: 2015-11-03
- Inventor: Mark Taskar , Iqbal Shareef
- Applicant: Mark Taskar , Iqbal Shareef
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: B60B15/04
- IPC: B60B15/04 ; F17D1/00 ; B08B15/00 ; B08B15/04

Abstract:
A method and apparatus is provided for decreasing the scrubber exhaust from gas panels, lower the cost of operation, lower the facilitation cost and power consumption by increasing the air velocity in areas of high potential risk of ignition. The apparatus includes a supply of compressed dry air (CDA) through the tubing with individual dispersion nozzles. The CDA dispersion nozzles can be installed at various key locations in order to provide additional ventilation turbulence and reduce potential dead zones inside the gas panel. Aspects of the invention help to save the energy and protect the environment by reducing the power consumption. In addition human safety shall be improved by minimizing the potential risk of ignition.
Public/Granted literature
- US20120318362A1 SYSTEM AND METHOD FOR DECREASING SCRUBBER EXHAUST FROM GAS DELIVERY PANELS Public/Granted day:2012-12-20
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