Invention Grant
- Patent Title: Optical module with a measuring device
- Patent Title (中): 具有测量装置的光学模块
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Application No.: US14070702Application Date: 2013-11-04
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Publication No.: US09175948B2Publication Date: 2015-11-03
- Inventor: Armin Schoeppach , Stefan Hembacher , Guido Limbach , Jens Kugler
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102011075316 20110505
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G03F7/20 ; G02B26/06 ; G02B26/08

Abstract:
An optical module, in particular for microlithography, with an optical element unit, a support device, a deformation device and a measuring device is disclosed. The support device is supported on the optical element unit, whereas for deforming an optical surface of the optical element unit, the deformation device engages a deformation section of the optical element unit comprising the optical surface. For determining the position and/or the orientation of the optical element unit with respect to an external reference in at least one degree of freedom, the measuring device comprises at least one measuring element, wherein the measuring element is arranged on a reference section of the optical element unit.
Public/Granted literature
- US20140125995A1 OPTICAL MODULE WITH A MEASURING DEVICE Public/Granted day:2014-05-08
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