Invention Grant
US09176186B2 Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed 有权
将晶片/晶片转换器对保持在没有垫圈布置的附接状态

Maintaining a wafer/wafer translator pair in an attached state free of a gasket disposed
Abstract:
A wafer translator and a wafer, removably attached to each other, provides the electrical connection to electrical contacts on integrated circuits on a wafer in such a manner that the electrical contacts are substantially undamaged in the process of making such electrical connections. Various embodiments of the present invention provide a gasketless sealing means for facilitating the formation by vacuum attachment of the wafer/wafer translator pair. In this way, no gasket is required to be disposed between the wafer and the wafer translator. Air, or gas, is evacuated from between the wafer and wafer translator through one or more evacuation pathways in the gasketless sealing means.
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