Invention Grant
US09176204B2 TMR magnetic sensor including a conductive material and a passivation film and manufacturing method therefor 有权
包括导电材料和钝化膜的TMR磁传感器及其制造方法

TMR magnetic sensor including a conductive material and a passivation film and manufacturing method therefor
Abstract:
A tunnel magneto-resistance (TMR) magnetic sensor and its manufacturing method are provided in which its degradation of the degree of accuracy of angle detection or the like is not caused due to an electrical discharge current by static electricity. The TMR magnetic sensor includes a TMR sensor element formed on a first face of a substrate with an insulation film interposing therebetween; a conductive material formed on the first face of the substrate, being electrically connected to the substrate; and a passivation film surrounding a surface of the TMR sensor element and that of the conductive material, wherein at least a portion of the conductive material faces toward an opening portion formed in the passivation film.
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