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US09176318B2 Methods for manufacturing fluid-filled MEMS displays 有权
制造流体充填MEMS显示器的方法

Methods for manufacturing fluid-filled MEMS displays
Abstract:
This invention relates to methods of manufacturing fluid-filled MEMS displays, where the fluid is sealed in the display assembly and substantially surrounds the moving components of the display to reduce the effects of stiction and to improve the optical and electromechanical performance of the display.
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