Invention Grant
US09177985B2 Array of nanowires in a single cavity with anti-reflective coating on substrate
有权
在单个腔中的纳米线阵列，在基底上具有抗反射涂层
- Patent Title: Array of nanowires in a single cavity with anti-reflective coating on substrate
- Patent Title (中): 在单个腔中的纳米线阵列，在基底上具有抗反射涂层
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Application No.: US14021672Application Date: 2013-09-09
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Publication No.: US09177985B2Publication Date: 2015-11-03
- Inventor: Munib Wober
- Applicant: ZENA TECHNOLOGIES, INC.
- Applicant Address: US MA Cambridge
- Assignee: ZENA TECHNOLOGIES, INC.
- Current Assignee: ZENA TECHNOLOGIES, INC.
- Current Assignee Address: US MA Cambridge
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G01N21/25
- IPC: G01N21/25 ; H01L27/00 ; H01L27/146 ; B82Y20/00 ; B82Y15/00 ; B82Y99/00
Abstract:
An embodiment relates to image sensor comprising one or more nanowires on a substrate of a cavity, the nanowire being configured to transmit a first portion of an electromagnetic radiation beam incident on the sensor, and the substrate that absorbs a second portion of the electromagnetic radiation beam incident on the sensor, wherein the first portion is substantially different from the second portion. The substrate could have a anti-reflective material. The ratio of a diameter of the cavity to a diameter of the nanowire could be at less than about 10.
Public/Granted literature
- US20140008752A1 ARRAY OF NANOWIRES IN A SINGLE CAVITY WITH ANTI-REFLECTIVE COATING ON SUBSTRATE Public/Granted day:2014-01-09
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