A termination structure for a semiconductor device includes a semiconductor substrate having an active region and a termination region. Two or more trench cells are located in the termination region and extend from a boundary of the active region toward an edge of the semiconductor substrate. A termination trench is formed in the termination region on a side of the trench cells remote from the active region. A conductive spacer is located adjacent to a sidewall of the termination trench nearest the trench cells. A first oxide layer is formed in the termination trench and contacts a sidewall of the conductive spacer. A first conductive layer is formed on a backside surface of the semiconductor substrate. A second conductive layer is formed atop the active region and the termination region.