Invention Grant
- Patent Title: Methods of forming gate structures of semiconductor devices
- Patent Title (中): 形成半导体器件栅极结构的方法
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Application No.: US14459446Application Date: 2014-08-14
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Publication No.: US09178035B1Publication Date: 2015-11-03
- Inventor: Min Gyu Sung , Chanro Park , Hoon Kim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L29/66 ; H01L21/3213

Abstract:
One method of forming replacement gate structures for first and second devices, the first device being a short channel device and the second device being a long channel device, is disclosed which includes forming a first and a second gate cavity above a semiconductor substrate, the first gate cavity being narrower than the second gate cavity, forming a bulk metal layer within the first and second gate cavities, performing an etching process to recess the bulk metal layer within the first and second gate cavities, resulting in the bulk metal layer within the second gate cavity being at its final thickness, forming a masking layer over the bulk metal layer within the second gate cavity, and performing an etching process to further recess the bulk metal layer within the first gate cavity, resulting in the bulk metal layer within the first gate cavity being at its final thickness.
Information query
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