Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US14287240Application Date: 2014-05-27
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Publication No.: US09178044B2Publication Date: 2015-11-03
- Inventor: Sung-Min Kim , Ji-Su Kang , Dong-Kyu Lee , Dong-Ho Cha
- Applicant: Sung-Min Kim , Ji-Su Kang , Dong-Kyu Lee , Dong-Ho Cha
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2013-0061775 20130530
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/20 ; H01L21/36 ; H01L21/336 ; H01L29/66 ; H01L29/78

Abstract:
Provided are a semiconductor device and a method for fabricating the same. The method for fabricating a semiconductor device comprises, providing an active fin and a field insulating film including a first trench disposed on the active fin; forming a second trench through performing first etching of the field insulating film that is disposed on side walls and a lower portion of the first trench; forming a first region and a second region in the field insulating film through performing second etching of the field insulating film that is disposed on side walls and a lower portion of the second trench, the first region is disposed adjacent to the active fin and has a first thickness, and the second region is disposed spaced apart from the active fin as compared with the first region and has a second thickness that is thicker than the first thickness; and forming a gate structure on the active fin and the field insulating film.
Public/Granted literature
- US20140357061A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2014-12-04
Information query
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