Invention Grant
US09178066B2 Methods for forming a semiconductor arrangement with structures having different heights
有权
用于形成具有不同高度的结构的半导体装置的方法
- Patent Title: Methods for forming a semiconductor arrangement with structures having different heights
- Patent Title (中): 用于形成具有不同高度的结构的半导体装置的方法
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Application No.: US14014479Application Date: 2013-08-30
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Publication No.: US09178066B2Publication Date: 2015-11-03
- Inventor: Tsung-Yu Chiang , Chen Kuang-Hsin , Bor-Zen Tien , Tzong-Sheng Chang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L29/78 ; H01L29/66 ; H01L21/311 ; H01L21/3213 ; G03F7/20

Abstract:
Among other things, one or more semiconductor arrangements, and techniques for forming such semiconductor arrangements are provided. A layer, such as a poly layer or an inter layer dielectric (ILD) layer, is formed over a substrate. A photoresist mask is formed over the layer. The photoresist mask comprises an open region overlaying a target region of the layer and comprises a protection region overlaying a second region of the layer. An etching process is performed through the open region to reduce a height of the layer in the target region in relation to a height of the layer in the second region because the protection region inhibits the etching process from affecting the layer in the second region. A first structure, having a first height, is formed within the target region. A second structure, having a second height greater than the first height, is formed within the second region.
Public/Granted literature
- US20150061016A1 MULTI-HEIGHT SEMICONDUCTOR STRUCTURES Public/Granted day:2015-03-05
Information query
IPC分类: