Invention Grant
US09178090B2 Reaction apparatus and method for manufacturing a CIGS absorber of a thin film solar cell 有权
用于制造薄膜太阳能电池的CIGS吸收体的反应装置和方法

Reaction apparatus and method for manufacturing a CIGS absorber of a thin film solar cell
Abstract:
The present invention provides an apparatus and a method for manufacturing a CIGS absorber of a thin film solar cell. The apparatus includes a supply chamber configured to provide a flexible substrate coated with precursors. The apparatus further includes a reaction chamber coupled to the supply chamber for at least subjecting the precursors on the flexible substrate to a reactive gas at a first state to form an absorber material. Additionally, the apparatus includes a gas-balancing chamber filled with the reactive gas at a second state. The gas-balancing chamber is communicated with the reaction chamber for automatically updating the first state of the reactive gas to the second state. Moreover, the apparatus includes a control system to maintain the second state of the reactive gas in the gas-balancing chamber at a preset condition and to adjust the transportation of the flexible substrate through the reaction chamber.
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