Invention Grant
US09178090B2 Reaction apparatus and method for manufacturing a CIGS absorber of a thin film solar cell
有权
用于制造薄膜太阳能电池的CIGS吸收体的反应装置和方法
- Patent Title: Reaction apparatus and method for manufacturing a CIGS absorber of a thin film solar cell
- Patent Title (中): 用于制造薄膜太阳能电池的CIGS吸收体的反应装置和方法
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Application No.: US13941012Application Date: 2013-07-12
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Publication No.: US09178090B2Publication Date: 2015-11-03
- Inventor: Delin Li
- Applicant: Delin Li
- Applicant Address: CN Shenzhen
- Assignee: Soltrium Technology, LTD.
- Current Assignee: Soltrium Technology, LTD.
- Current Assignee Address: CN Shenzhen
- Agent Fang Wu
- Priority: CN201210478386 20121122
- Main IPC: C23C16/54
- IPC: C23C16/54 ; H01L21/67 ; H01L31/0392 ; H01L31/032 ; C23C16/455

Abstract:
The present invention provides an apparatus and a method for manufacturing a CIGS absorber of a thin film solar cell. The apparatus includes a supply chamber configured to provide a flexible substrate coated with precursors. The apparatus further includes a reaction chamber coupled to the supply chamber for at least subjecting the precursors on the flexible substrate to a reactive gas at a first state to form an absorber material. Additionally, the apparatus includes a gas-balancing chamber filled with the reactive gas at a second state. The gas-balancing chamber is communicated with the reaction chamber for automatically updating the first state of the reactive gas to the second state. Moreover, the apparatus includes a control system to maintain the second state of the reactive gas in the gas-balancing chamber at a preset condition and to adjust the transportation of the flexible substrate through the reaction chamber.
Public/Granted literature
- US20140141562A1 REACTION APPARATUS AND METHOD FOR MANUFACTURING A CIGS ABSORBER OF A THIN FILM SOLAR CELL Public/Granted day:2014-05-22
Information query
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