Invention Grant
- Patent Title: Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display element
- Patent Title (中): 柔性基板，显示元件的制造方法以及显示元件的制造装置
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Application No.: US12576752Application Date: 2009-10-09
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Publication No.: US09178155B2Publication Date: 2015-11-03
- Inventor: Kei Nara , Tomohide Hamada , Masaki Kato , Tohru Kiuchi
- Applicant: Kei Nara , Tomohide Hamada , Masaki Kato , Tohru Kiuchi
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2008-263437 20081010
- Main IPC: B05D5/12
- IPC: B05D5/12 ; B65G47/26 ; B65G1/133 ; H01L51/00 ; H01L51/52 ; H01L51/56
Abstract:
In a manufacturing apparatus of display element, a display element is formed in a flexible substrate that has a first surface and a second surface that is an opposite surface thereof, and this manufacturing apparatus of display element includes a transportation section that transports the flexible substrate in a predetermined direction that intersects with a width direction of the flexible substrate; a first partition wall formation section that forms a first partition wall for a display element in the first surface; and a second partition wall formation section that forms a second partition wall in the second surface.
Public/Granted literature
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