A donor substrate having a plurality of recesses and isolation structures may be provided. The isolation structures may be defined by the recesses. A first electrode is formed on a first substrate. A pixel defining layer may be formed on the first electrode to define a plurality of pixel regions. The donor substrate may be arranged over the first substrate, and a laser induced thermal imaging process may be performed to form a plurality of light emitting layers in the pixel regions. A second electrode may be formed on the pixel defining layer and the light emitting layers. The organic light emitting layers having minute dimensions may be effectively obtained from the donor substrate. The isolation structures may be formed integrally with the substrate, and thus the donor substrate may be easily recycled after the laser induced thermal imaging process.