Invention Grant
US09178406B2 Linear motor and stage device 有权
直线电机和平台装置

Linear motor and stage device
Abstract:
A linear motor includes a field magnet and an armature. The field magnet includes a pair of opposing field magnet yokes. A yoke base is disposed on a first end of each field magnet yoke in a Y axis direction. Between the field magnet yokes, a first magnet row is disposed including, along an X axis direction, a plurality of opposing pairs of first magnets having different polarities. Between the field magnet yokes, a second magnet row is disposed to a first side or a second side of the first magnet row in the Y axis direction. The second magnet row includes a pair of opposing second magnets having different polarities and forming a single row in the Y axis direction on the field magnet yokes. The armature includes a first armature coil opposite the first magnet row and a second armature coil opposite the second magnet row.
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