Invention Grant
- Patent Title: Liquid-discharging device with observation optical system
- Patent Title (中): 具有观察光学系统的排液装置
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Application No.: US14006664Application Date: 2011-04-11
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Publication No.: US09182627B2Publication Date: 2015-11-10
- Inventor: Daisuke Hoshizawa
- Applicant: Daisuke Hoshizawa
- Applicant Address: JP Nagano
- Assignee: ENGINEERING SYSTEM CO., LTD.
- Current Assignee: ENGINEERING SYSTEM CO., LTD.
- Current Assignee Address: JP Nagano
- International Application: PCT/JP2011/002138 WO 20110411
- International Announcement: WO2012/140689 WO 20121018
- Main IPC: G02F1/1335
- IPC: G02F1/1335 ; B05C5/02 ; G01B11/14 ; B05B5/00 ; B05B12/12

Abstract:
In a liquid discharging device, an objective optical system is moved in the optical axis direction by a focus position adjusting mechanism to perform a first focusing action relative to the tip of a liquid discharging nozzle or a mirror image thereof and a second focusing action relative to the surface of a substrate facing the liquid discharging nozzle, the distance between the nozzle tip and the surface of the substrate is calculated on the basis of the resulting focus positions, and the position of the liquid discharging nozzle is adjusted by nozzle position adjusting mechanism so that the gap is appropriate. According to this configuration, the distance between the nozzle tip and the surface of the substrate can be precisely calculated and an optical unit for observation can be focused on the surface of the substrate.
Public/Granted literature
- US20140007810A1 LIQUID-DISCHARGING DEVICE WITH OBSERVATION OPTICAL SYSTEM Public/Granted day:2014-01-09
Information query
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