Invention Grant
US09184077B2 Wafer pod and wafer positioning mechanism thereof 有权
晶圆荚及其晶圆定位机构

Wafer pod and wafer positioning mechanism thereof
Abstract:
Embodiments of mechanisms of a wafer pod including a wafer positioning mechanism are provided. The wafer positioning mechanism includes a base including a blocking portion, and a linking bar pivoted on the base and including a resilient portion. The wafer positioning mechanism also includes a pushing element pivoted on the linking shaft. Further, when the pushing element is at a retaining position, the resilient portion abuts against the blocking portion, and a force generated by the linking bar is applied to the pushing element.
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