Invention Grant
- Patent Title: Wafer pod and wafer positioning mechanism thereof
- Patent Title (中): 晶圆荚及其晶圆定位机构
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Application No.: US14040888Application Date: 2013-09-30
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Publication No.: US09184077B2Publication Date: 2015-11-10
- Inventor: Sung-Chun Yang , Ying-Chi Peng , Yao-Pin Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee Address: TW Hsin-Chu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
Embodiments of mechanisms of a wafer pod including a wafer positioning mechanism are provided. The wafer positioning mechanism includes a base including a blocking portion, and a linking bar pivoted on the base and including a resilient portion. The wafer positioning mechanism also includes a pushing element pivoted on the linking shaft. Further, when the pushing element is at a retaining position, the resilient portion abuts against the blocking portion, and a force generated by the linking bar is applied to the pushing element.
Public/Granted literature
- US20150090630A1 WAFER POD AND WAFER POSITIONING MECHANISM THEREOF Public/Granted day:2015-04-02
Information query
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