Invention Grant
US09184083B2 Apparatus, hybrid laminated body, method and materials for temporary substrate support
有权
仪器，混合层压体，临时衬底支撑的方法和材料
- Patent Title: Apparatus, hybrid laminated body, method and materials for temporary substrate support
- Patent Title (中): 仪器，混合层压体，临时衬底支撑的方法和材料
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Application No.: US13953348Application Date: 2013-07-29
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Publication No.: US09184083B2Publication Date: 2015-11-10
- Inventor: Wayne S. Mahoney , Rajdeep S. Kalgutkar
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- Agent Adam Bramwell; Ann Gallagher
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/683 ; H01L21/304
Abstract:
A hybrid laminated body is provided that includes a light-transmitting support, a latent release layer disposed upon the light-transmitting support, a joining layer disposed upon the latent release layer, and a polyamide thermoplastic priming layer disposed upon the joining layer. The hybrid laminated body can further include a substrate to be processed such as, for example, a silicon wafer to be ground. Also provided is a method for manufacturing the provided laminated body.
Public/Granted literature
- US20150031215A1 APPARATUS, HYBRID LAMINATED BODY, METHOD AND MATERIALS FOR TEMPORARY SUBSTRATE SUPPORT Public/Granted day:2015-01-29
Information query
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