Invention Grant
US09184166B2 Manufacturing method of capacitor structure and semiconductor device using the same
有权
电容器结构的制造方法及使用其的半导体器件
- Patent Title: Manufacturing method of capacitor structure and semiconductor device using the same
- Patent Title (中): 电容器结构的制造方法及使用其的半导体器件
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Application No.: US14272804Application Date: 2014-05-08
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Publication No.: US09184166B2Publication Date: 2015-11-10
- Inventor: Tzung-Han Lee , Yaw-Wen Hu , Vishnu Kumar Agarwal
- Applicant: INOTERA MEMORIES, INC.
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW103101958A 20140120
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L27/108 ; H01L21/8242 ; H01L21/331

Abstract:
The instant disclosure relates to a semiconductor device which includes a semiconductor substrate, at least one patterned reinforcing layer, a plurality of lower electrodes, and a supporting layer. The at least one patterned reinforcing layer is arranged above the semiconductor substrate, wherein the at least one patterned reinforcing layer has a plurality of reinforcing structures configured to define a plurality of alignment apertures. The lower electrodes are arranged on the semiconductor substrate, wherein N of the lower electrodes pass through each of the alignment apertures, where N is an integer greater than or equal to 1. The supporting layer is arranged above the at least one patterned reinforcing layer and between the lower electrodes.
Public/Granted literature
- US20150206883A1 MANUFACTURING METHOD OF CAPACITOR STRUCTURE AND SEMICONDUCTOR DEVICE USING THE SAME Public/Granted day:2015-07-23
Information query
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