Invention Grant
- Patent Title: Memory cell support lattice
- Patent Title (中): 存储单元支持格
-
Application No.: US13590791Application Date: 2012-08-21
-
Publication No.: US09184167B2Publication Date: 2015-11-10
- Inventor: Zhimin Song , Che-Chi Lee , Brett Busch
- Applicant: Zhimin Song , Che-Chi Lee , Brett Busch
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/8242 ; H01L49/02

Abstract:
Memory cell support lattices and methods of forming the same are described herein. As an example, a method of forming a memory cell support lattice includes forming a mask on a number of capacitor elements in an array, such that a space between vertically and horizontally adjacent capacitor elements is fully covered and a space between diagonally adjacent capacitor elements is partially covered and forming a support lattice in a support material by etching the support material to remove portions of the support material below the openings in the mask.
Public/Granted literature
- US20140054745A1 MEMORY CELL SUPPORT LATTICE Public/Granted day:2014-02-27
Information query
IPC分类: