Invention Grant
- Patent Title: 3D variable resistance memory device and method of manufacturing the same
- Patent Title (中): 3D可变电阻存储器件及其制造方法
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Application No.: US13975639Application Date: 2013-08-26
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Publication No.: US09184216B2Publication Date: 2015-11-10
- Inventor: Nam Kyun Park
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2013-0046090 20130425
- Main IPC: G11C11/00
- IPC: G11C11/00 ; H01L27/24 ; G11C13/00 ; G11C11/16 ; H01L45/00

Abstract:
A variable resistance memory device includes a plurality of cell gate electrodes extending in a first direction, wherein the plurality of cell gate electrodes are stacked in a second direction that is substantially perpendicular to the first direction. A gate insulating layer surrounds each cell gate electrode of the plurality of cell gate electrodes and a cell drain region is formed on two sides of the each cell gate electrode of the plurality of cell gate electrodes. A channel layer extends in the second direction along the stack of the plurality of cell gate electrodes, and a variable resistance layer contacting the channel layer.
Public/Granted literature
- US20140321193A1 3D VARIABLE RESISTANCE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-10-30
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