Invention Grant
- Patent Title: Ultra-high voltage laterally-diffused MOS devices and methods of forming the same
- Patent Title (中): 超高压横向扩散MOS器件及其形成方法
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Application No.: US13963658Application Date: 2013-08-09
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Publication No.: US09184282B2Publication Date: 2015-11-10
- Inventor: Tzu-Ming Huang , Chia-Chia Kan , Shen-Ping Wang , Lieh-Chuan Chen , Po-Tao Chu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/10

Abstract:
Embodiments for the present disclosure include a semiconductor device, an ultra-high voltage (UHV) laterally-diffused metal-oxide-semiconductor (LDMOS) transistor, and methods of forming the same. An embodiment includes a first well region of a first conductivity type in a top surface of a substrate, and a second well region of a second conductivity type in the top surface of the substrate. The second well region laterally separated from the first well region by a portion of the substrate. The embodiment further includes a third region of the second conductivity type in the first well region, and a first field oxide region in the first well region, a second field oxide region in the second well region, the second field oxide region having a second bottom surface, and the first field oxide region having a first bottom surface lower than the second bottom surface and on and directly contacting the third region.
Public/Granted literature
- US20150041891A1 Ultra-High Voltage Laterally-Diffused MOS Devices and Methods of Forming the Same Public/Granted day:2015-02-12
Information query
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