Invention Grant
US09184371B2 Piezoelectric thin film, method for manufacturing same, inkjet head, method for forming image using inkjet head, angular velocity sensor, method for measuring angular velocity using angular velocity sensor, piezoelectric power generation element, and method for generating power using piezoelectric power generation element
有权
压电薄膜，其制造方法，喷墨头，使用喷墨头形成图像的方法，角速度传感器，使用角速度传感器测量角速度的方法，压电发电元件和使用压电发电元件发电的方法
- Patent Title: Piezoelectric thin film, method for manufacturing same, inkjet head, method for forming image using inkjet head, angular velocity sensor, method for measuring angular velocity using angular velocity sensor, piezoelectric power generation element, and method for generating power using piezoelectric power generation element
- Patent Title (中): 压电薄膜，其制造方法，喷墨头，使用喷墨头形成图像的方法，角速度传感器，使用角速度传感器测量角速度的方法，压电发电元件和使用压电发电元件发电的方法
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Application No.: US13731221Application Date: 2012-12-31
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Publication No.: US09184371B2Publication Date: 2015-11-10
- Inventor: Takakiyo Harigai , Yoshiaki Tanaka , Hideaki Adachi , Eiji Fujii
- Applicant: PANASONIC CORPORATION
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2011-021331 20110203
- Main IPC: H01L41/00
- IPC: H01L41/00 ; B41J2/045 ; H01L41/18 ; B41J2/14 ; G01C19/5621 ; H01L41/09 ; H01L41/187 ; C30B29/32 ; C30B29/68 ; H01L41/113 ; H01L41/08 ; H01L41/314
Abstract:
Provided is a piezoelectric thin film including a non-lead-containing (that is, lead-free) ferroelectric material and having high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric film according to the present invention comprises a laminate structure. The laminate structure comprises an electric film and a (1-x)(Na,Bi)TiO3-xBaTiO3 film. x represents a value of not less than 0.03 and not more than 0.15. The (1-x)(Na,Bi)TiO3-xBaTiO3 film has a (110) surface orientation only. The (1-x)(Na,Bi)TiO3-xBaTiO3 film has an orthorhombic crystal structure only.
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