Invention Grant
- Patent Title: Acoustic wave device
- Patent Title (中): 声波装置
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Application No.: US13556865Application Date: 2012-07-24
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Publication No.: US09184725B2Publication Date: 2015-11-10
- Inventor: Shinji Taniguchi , Tokihiro Nishihara , Masanori Ueda , Tsuyoshi Yokoyama , Takeshi Sakashita
- Applicant: Shinji Taniguchi , Tokihiro Nishihara , Masanori Ueda , Tsuyoshi Yokoyama , Takeshi Sakashita
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2011-174290 20110809
- Main IPC: H03H9/70
- IPC: H03H9/70 ; H03H9/54 ; H03H9/02 ; H03H9/13 ; H03H9/17 ; H03H3/04 ; H03H9/56 ; H03H9/58 ; H03H3/02

Abstract:
An acoustic wave device includes: a substrate; a lower electrode formed on the substrate; at least two piezoelectric films formed on the lower electrode; an insulating film located between the at least two piezoelectric films; and an upper electrode formed on the at least two piezoelectric films, wherein an outer periphery of an uppermost piezoelectric film out of the at least two piezoelectric films in a region in which the lower electrode and the upper electrode face each other is positioned further in than an outer periphery of the upper electrode.
Public/Granted literature
- US20130038405A1 ACOUSTIC WAVE DEVICE Public/Granted day:2013-02-14
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