Invention Grant
US09190600B2 Large-deflection microactuators 有权
大偏转微致动器

Large-deflection microactuators
Abstract:
Actuators using piezoelectric drives, S-drives, or S-flexures are disclosed. The actuators can include S-drives connected in series to deflect substantially in a common deflection direction. The actuators can also include pairs of piezoelectric elements connected together for rotation in the plane of the pairs. An arm assembly and a forearm assembly can each have a plurality of S-flexures for deflection along substantially orthogonal axes.
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