Invention Grant
- Patent Title: Electronic device, method for producing the same, and oscillator
- Patent Title (中): 电子装置及其制造方法以及振荡器
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Application No.: US14219694Application Date: 2014-03-19
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Publication No.: US09190954B2Publication Date: 2015-11-17
- Inventor: Takahiko Yoshizawa
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-068254 20130328
- Main IPC: H03B5/30
- IPC: H03B5/30 ; H01L21/768 ; B81C1/00 ; H03B5/32
Abstract:
An electronic device according to an aspect of the invention include: a substrate; an underlayer having an opening and being formed on the substrate; a functional element provided on the underlayer; and a surrounding wall forming a cavity that accommodates the functional element, at least a part of the surrounding wall being disposed in the opening.
Public/Granted literature
- US20140292430A1 ELECTRONIC DEVICE, METHOD FOR PRODUCING THE SAME, AND OSCILLATOR Public/Granted day:2014-10-02
Information query
