Invention Grant
- Patent Title: Forming magnetic microelectromechanical inductive components
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Application No.: US14608817Application Date: 2015-01-29
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Publication No.: US09193584B2Publication Date: 2015-11-24
- Inventor: William J. Gallagher , Eugene J. O'Sullivan , Naigang Wang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B81C1/00 ; H01L43/14 ; B81B3/00 ; H01L43/10 ; H01L43/12 ; H01L49/02 ; H01F41/04

Abstract:
A micro-electromechanical device and method of manufacture are disclosed. A sacrificial layer is formed on a silicon substrate. A metal layer is formed on a top surface of the sacrificial layer. Soft magnetic material is electrolessly deposited on the metal layer to manufacture the micro-electromechanical device. The sacrificial layer is removed to produce a metal beam separated from the silicon substrate by a space.
Public/Granted literature
- US20150140686A1 FORMING MAGNETIC MICROELECTROMECHANICAL INDUCTIVE COMPONENTS Public/Granted day:2015-05-21
Information query
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