Invention Grant
- Patent Title: Cascaded micromechanical actuator structure
- Patent Title (中): 级联微机械致动器结构
-
Application No.: US13124468Application Date: 2009-08-24
-
Publication No.: US09195054B2Publication Date: 2015-11-24
- Inventor: Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
- Applicant: Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008042967 20081020
- International Application: PCT/EP2009/060865 WO 20090824
- International Announcement: WO2010/046154 WO 20100429
- Main IPC: H02N1/06
- IPC: H02N1/06 ; G02B26/08 ; B81B3/00 ; H02N1/00

Abstract:
A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.
Public/Granted literature
- US20110248601A1 CASCADED MICROMECHANICAL ACTUATOR STRUCTURE Public/Granted day:2011-10-13
Information query