Invention Grant
- Patent Title: RF impedance matching network
- Patent Title (中): 射频阻抗匹配网络
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Application No.: US14669568Application Date: 2015-03-26
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Publication No.: US09196459B2Publication Date: 2015-11-24
- Inventor: Imran Ahmed Bhutta
- Applicant: Reno Technologies, Inc.
- Assignee: RENO TECHNOLOGIES, INC.
- Current Assignee: RENO TECHNOLOGIES, INC.
- Agency: The Belles Group, P.C.
- Main IPC: H05H1/46
- IPC: H05H1/46 ; C23C16/00 ; H01J37/32 ; H01J37/248 ; H01J37/24 ; H01J37/244 ; H01L21/67

Abstract:
An RF impedance matching network includes an RF input; an RF output configured to operably couple to a plasma chamber; a series electronically variable capacitor (“series EVC”), the series EVC electrically coupled in series between the RF input and the RF output; and a shunt electronically variable capacitor (“shunt EVC”), the shunt EVC electrically coupled in parallel between a ground and one of the RF input and the RF output; a control circuit to control the series variable capacitance and the shunt variable capacitance, wherein the control circuit is configured to determine the variable plasma impedance of the plasma chamber, determine a series capacitance value and a shunt capacitance value, and generate a control signal to alter at least one of the series variable capacitance and the shunt variable capacitance; wherein the alteration is caused by at least one of a plurality of switching circuits.
Public/Granted literature
- US20150200079A1 RF IMPEDANCE MATCHING NETWORK Public/Granted day:2015-07-16
Information query
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