Invention Grant
- Patent Title: Inorganic phosphate containing doping compositions
- Patent Title (中): 含磷酸盐的掺杂组合物
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Application No.: US13661515Application Date: 2012-10-26
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Publication No.: US09196486B2Publication Date: 2015-11-24
- Inventor: Elena Rogojina
- Applicant: Elena Rogojina
- Applicant Address: US CA Sunnyvale
- Assignee: Innovalight, Inc.
- Current Assignee: Innovalight, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Foley & Lardner LLP
- Main IPC: H01L21/38
- IPC: H01L21/38 ; H01L21/22 ; H01L21/228 ; H01L31/18
Abstract:
A composition for doping semiconductor materials, such as silicon, may contain a) a solvent and a) an inorganic salt of a phosphor containing acid dispersed in the solvent. Also disclosed are doping methods using such composition as well as methods of making the doping composition.
Public/Granted literature
- US20140120705A1 INORGANIC PHOSPHATE CONTAINING DOPING COMPOSITIONS Public/Granted day:2014-05-01
Information query
IPC分类:
