Invention Grant
- Patent Title: Three-dimensional semiconductor device and method of fabricating the same
- Patent Title (中): 三维半导体器件及其制造方法
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Application No.: US14276124Application Date: 2014-05-13
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Publication No.: US09196525B2Publication Date: 2015-11-24
- Inventor: Jae-Joo Shim , Hansoo Kim , Wonseok Cho , Jaehoon Jang , Woojin Cho
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-Si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2009-0126854 20091218
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L27/115

Abstract:
Provided are a three-dimensional semiconductor device and a method of fabricating the same. The three-dimensional semiconductor device may include a mold structure for providing gap regions and an interconnection structure including a plurality of interconnection patterns disposed in the gap regions. The mold structure may include interlayer molds defining upper surfaces and lower surfaces of the interconnection patterns and sidewall molds defining sidewalls of the interconnection patterns below the interlayer molds.
Public/Granted literature
- US20140248766A1 THREE-DIMENSIONAL SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2014-09-04
Information query
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