Invention Grant
- Patent Title: Stress inducing contact metal in FinFET CMOS
- Patent Title (中): FinFET CMOS中应力感应接触金属
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Application No.: US14083544Application Date: 2013-11-19
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Publication No.: US09196613B2Publication Date: 2015-11-24
- Inventor: Veeraraghavan S. Basker , Kangguo Cheng , Ali Khakifirooz , Charles W. Koburger, III
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael A. Petrocelli; Howard M. Cohn
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/092 ; H01L21/8238 ; H01L29/78

Abstract:
A method of forming a semiconductor structure includes forming a first plurality of fins in a first region of a semiconductor substrate and a second plurality of fins in a second region of a semiconductor substrate. A gate structure is formed covering a first portion of the first and second plurality of fins. The gate structure does not cover a second portion of the first and second plurality of fins. A first epitaxial layer is grown surrounding the second portion of the first plurality of fins and a second epitaxial layer is grown surrounding the second portion of the second plurality of fins. An ILD layer is deposited and partially etched to expose the first epitaxial layer and a top portion of the second epitaxial layer. A metal layer is deposited around the first epitaxial layer and above the top portion of the second epitaxial layer.
Public/Granted literature
- US20150137181A1 STRESS INDUCING CONTACT METAL IN FINFET CMOS Public/Granted day:2015-05-21
Information query
IPC分类: