Invention Grant
US09196732B2 Fin field effect transistor having tapered sidewalls, and method of forming the same 有权
具有锥形侧壁的鳍式场效应晶体管及其形成方法

Fin field effect transistor having tapered sidewalls, and method of forming the same
Abstract:
The description relates to a fin field effect transistor (FinFET). An exemplary structure for a FinFET includes a fin having a first height above a first surface of a substrate, where a portion of the fin has first tapered sidewalls, and the fin has a top surface. The FinFET further includes an insulation region over a portion of the first surface of the substrate, where a top of the insulation region defines a second surface. The FinFET further includes a gate dielectric over the first tapered sidewalls and the top surface. The FinFET further includes a conductive gate strip over the gate dielectric, where the conductive gate strip has second tapered sidewalls along a longitudinal direction perpendicular to the first height, and a first width between the second tapered sidewalls in the longitudinal direction is greater at a location nearest to the substrate than a second width at a location farthest from the substrate.
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