Invention Grant
US09198283B2 Vertically spaced electrode structure 有权
垂直间隔电极结构

Vertically spaced electrode structure
Abstract:
A vertically separated electrode structure includes a polymeric material post on a substrate. An inorganic material cap covers the top of the post and extends beyond an edge of the post in at least a width dimension to define a first reentrant profile. A first electrode is located over the cap. A second electrode is located over the substrate and not over the post. The second electrode is adjacent to the edge of the post in the reentrant profile such that a distance between the first electrode and second electrode is greater than zero when measured orthogonally to the substrate surface. The first electrode and second electrode have the same material composition and layer thickness.
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